Mahr replace with the MarSurf UD 130 the successful MarSurf UD 120 and closed the gap between the high end solution MarSurf LD 130/LD 260 and the standard combination measuring station MarSurf XCR 20 with two drive units.The technical specification of the MarSurf UD 130 is far superior to that of the MarSurf UD 120: in particular, the measuring and positioning speeds have reduced the measuring t
| 量速度（文本） | 0.1 mm/s to 5 mm/s; |
| 掃描長度末尾（X 方向） | 130 mm |
| 分辨率 | 2 nm |
| 掃描長度開始（X 方向） | 0.1 mm |
| 定位速度（文本） | 0.1 mm/s to 30 mm/s |
| 輸入 | Standard probe LP-D 14-10-2/60° |
| 測量范圍 mm | 10 mm (100 mm probe arm) |
| 輪廓分辨率 | 2 nm |
| 掃描長度（文本） | 0.1 mm to 130 mm |
| 測量力 (N) | 1 mN to 30 mN, software-adjustable |
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